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1 cze 2024 · MEMS, or microelectromechanical systems, have greatly transformed multiple industries with their small size and adaptable capabilities. MEMS technology in biosensing allows for rapid and accurate identification of biological analytes, assisting in medical diagnoses and therapies.
26 sty 2021 · This article reviews several popular actuation and sensing mechanisms related to MEMS devices that have emerged over the past few decades. This article introduced a descriptive overview to the advancement of the actuation and sensing mechanisms of the MEMS-based sensor devices.
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26 sty 2024 · This paper reviews the development of silicon resonant accelerometers from 1987 to 2022. For more than 30 years, silicon resonant accelerometers have developed into varieties of structures based on different sensing methods.
19 mar 2012 · This paper reviews the common failure mechanisms in MEMS, including mechanical fracture, fatigue, creep, stiction, wear, electrical short and open, contamination, their effects on devices' performance, inspection techniques, and approaches to mitigate those failures through structure optimization and material selection.
